Local copy of the 8th edition, Chapter Metrology, from Semiconductorfabtech.com: Review of In Situ & In-line Detection for CMP Applications By Mike Berman of LSI Logic, Thomas Bibby of IPEC Planar and Alan Smith of ESDAK Corp.
ESDAK has attended all Semiconwest trade shows from 2004-1999 and has presented in the following exhibitions.
Micro Magazine: ESDAK presents in the '99 Semiconwest Exhibition
ESDAK presents in the '98 Semiconwest Exhibition
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